[14p-K507-1~17] CS.5 Code-sharing Session of 6.5 & 7.5

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[14p-K507-8] Study of reaction process of methyl chloride on Si(111)-(7×7) surface using supersonic molecular beam

〇Masaaki Ando¹, Takamasa Makino¹, Yasutaka Tsuda², Akitaka Yoshigoe², Michio Okada^1,3 (1.U. Osaka, 2.JAEA, 3.U. Osaka IRS)

Keywords:

Rochow-Muller reaction,silicon,Methyl chloride

Dimethyldichlorosilane, a key precursor in silicone synthesis, is produced through a complex catalytic reaction involving CH₃Cl, Si, and Cu. To enhance reaction selectivity, it is crucial to elucidate the elementary processes dominating the reaction. We irradiated methyl chloride supersonic molecular beams to the Si(111)-(7×7) surface and measured the surface using synchrotron radiation X-ray photoelectron spectroscopy. The result revealed the reaction distinct from those observed in the CH₃Cl/Cu system. In the presentation, we will discuss the adsorption mechanisms in detail.