[14p-P01-1~26] 6.3 Oxide electronics

[14p-P01-4] Effect of substrate bias on VO₂ sputtering deposition on glass substrates with ZnO as buffer layer

〇Shimpei Shimono¹, Ryohei Wakayama², Taiyo Hirono², Kunio Okimura^1,2 (1.Graduate School of Engineering, Tokai Univ., 2.School of Engineering, Tokai Univ.)

Keywords:

zinc oxide (ZnO),vanadium dioxide (VO2),sputtering