[14p-P01-1~26] 6.3 Oxide electronics

[14p-P01-5] Preparation of VO₂/AZO/polyimide Flexible Films and the Performance of Voltage-Induced infrared Light switching

〇(M1)Rai Hiranabe¹, Peng Yu¹, Tian Lan², Kunio Okimura^1,2 (1.Graduate School of Engineering, Tokai Univ., 2.School of Engineering, Tokai Univ.)

Keywords:

Transparent Conductive Film,Vanadium Dioxide,Sputtering

Vanadium dioxide (VO₂) undergoes an insulator-metal transition (IMT) at approximately 68ºC, resulting in significant changes in both resistivity and optical properties. In this study, we fabricated VO₂ thin films on a polyimide substrate, which offers excellent heat resistance and flexibility, using aluminum-doped zinc oxide (AZO) as a buffer layer. The optical switching properties under applied voltage were then evaluated.