[14p-P07-1~61] 1 Interdisciplinary Physics and Related Areas of Science and Technology (Poster)

[14p-P07-17] Development of Science Teaching Materials using Maskless Photolithography

〇Hitoe Habuchi¹, Eiji Shiraki¹ (1.NIT, Gifu College)

Keywords:

semiconductor education,maskless photolithography

Gifu Kosen of Technology has introduced a maskless exposure system to enhance education in practical semiconductor technology. This allows our students to gain hands-on experience with semiconductor front-end processes and practice microfabrication using photolithography. In addition to semiconductor device fabrication, the system can also be utilized for science and physics education. This presentation discusses the application of the system in two areas: (i) the fabrication of optical elements as part of practical training for our students, and (ii) the development of semiconductor educational materials, such as a optical projector, for elementary and junior high school students.