[14p-P07-1~61] 1 Interdisciplinary Physics and Related Areas of Science and Technology (Poster)

[14p-P07-18] Mask fabrication using a cutting machine in pn junction formation

〇(B)Nana Kobayashi¹, Katsuki Watabe¹, Shinnosuke Idogawa¹ (1.NIT, Kushiro College)

Keywords:

pn junction,Mask fabrication,Development of teaching materials

Semiconductor device fabrication process has a problem high cost and safety issue. These issues become problems in the field of education. In this study, we proposed a method to fabricate elaborate mask made of Kapton tape using a cutting machine and applied to the selective diffusion process. Compared to conventional methods, the proposed method improves accuracy and uniformity and increases integration. This method is useful as a low-cost and safe method for device integration.