[14p-P07-1~61] 1 Interdisciplinary Physics and Related Areas of Science and Technology (Poster)

[14p-P07-32] Growth and Characterization of VO₂ Thin Film on Ultra-Thin Flexible Glass by MOD Method

〇(M1C)Chihiro Kuwayama¹, Nobuya Hiroshiba¹, Kazuto Koike¹, Hideo Wada¹, Masami Kawahara² (1.Osaka Inst. of Tech.,NMRC, 2.Kojundo Chemical Lab.)

Keywords:

Metal-organic decomposition,Vanadium dioxide,Smart window

We have fabricated an infrared thermochromic film by depositing a Nb-doped VO₂ thin film on an ultrathin flexible glass substrate by the MOD method. The visible light transmittance was improved by the insertion of a ZrO₂ buffer layer due to refractive index relaxation. The phase transition temperature was lowered by the addition of Nb. The prototype film had a visible light transmittance of over 55%, an NIR light modulation rate of over 45% and a phase transition temperature of 45°C. Our results indicated that the prototype film was at a practical level.