[15a-K205-1~9] 1.3 Novel technologies and interdisciplinary engineering

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[15a-K205-2] ALD coating and characterization of quantum dot laser facets

〇Yuki Nasu¹, Yuma Otsubo¹, Kiyoto Taniguchi¹, Yudai Isahaya¹, Tarou Itatani², Takeyoshi Sugaya², Joji Maeda¹, Takeru Amano² (1.Tokyo Univ. of Science, 2.AIST)

Keywords:

Quantum dots,semiconductor,laser

A quantum dot semiconductor laser is a semiconductor laser that incorporates nanosized semiconductor crystals in the active layer. The quantum dot structure allows the wavelength of the emitted light to be controlled by controlling the size of the quantum dots, and it has the characteristic of having low temperature dependency. Since it does not require a temperature control device, it is expected to be used in the future as a low cost, low power, and highly reliable laser. In this study, we will investigate the facet processing of quantum dot semiconductor lasers using an ALD system.