[15a-K205-1~9] 1.3 Novel technologies and interdisciplinary engineering

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[15a-K205-3] ALD Coating and Evaluation of Quantum dot optical amplifier

〇Yuma Otsubo¹, Yuki Nasu¹, Kiyoto Taniguchi¹, Yudai Isahaya¹, Taro Itatani², Sugaya Takeyoshi², joji Maeda¹, Takeru Amano² (1.Tokyo Univ. of Science, 2.AIST)

Keywords:

quantum dot,ALD

In optical co-packaging, lasers are used as a light source. Optical amplifiers are used to amplify the laser light. In this study, we fabricated and evaluated a semiconductor optical amplifier using quantum dots. The optical amplifier was fabricated by depositing a 20 nm layer of Al2O3 on the edge surface using the atomic layer deposition (ALD) method.