[15a-K301-1~11] 17.3 Layered materials

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[15a-K301-1] The relationship between the crystallinity and thermal conductivity of MoS₂ thin films produced by RF magnetron sputtering.

〇Tatsuya Kitazawa¹, Yuta Inaba¹, Shunsuke Yamashita¹, Shinya Imai², Keita Kurohara², Tetsuya Tatsumi², Hitoshi Wakabayashi², Shigetaka Tomiya^3,1,2 (1.Sony Semiconductor Solutions Corp., 2.Science Tokyo, 3.NAIST)

Keywords:

transition metal dichalcogenide,thermal conductivity,optothermal raman

Molybdenum disulfide (MoS₂) is a type of two-dimensional transition metal dichalcogenide that exhibits superior thermoelectric conversion performance compared to conventional materials. In this study, we investigated the changes in the thermal conductivity of MoS₂ thin films deposited by RF magnetron sputtering following sulfur vapor annealing (SVA) treatment. The results indicated that the SVA treatment enhances the crystallinity of the MoS₂ sputtered films and compensates for sulfur vacancies, leading to an improvement in the in-plane thermal conductivity of the MoS₂ thin films.