[15a-K503-1~9] 6.1 Ferroelectric thin films

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-K503-5] Epitaxial growth of AlScN thin films on ITO transparent electrodes and dependence of their polarity on Sc content

〇(M1)Xuankun Liu¹, Kotoko Abe¹, Xueyou Yuan¹, Kazuki Okamoto², Hiroshi Funakubo², Tomoaki Yamada^1,3 (1.Nagoya Univ., 2.Science Tokyo, 3.Science Tokyo, MDX)

Keywords:

aluminum nitride,polarity