[15a-K503-1~9] 6.1 Ferroelectric thin films

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-K503-6] Fabrication of Sc-doped AlN thin films by maskless-combinatorial PLD and their characterizations

〇(M1)Taiyo Mitaka¹, Xueyou Yuan¹, Tomoaki Yamada^1,2 (1.Nagoya Univ., 2.Science Tokyo, MDX)

Keywords:

aluminum nitride,pulsed laser deposition