[15a-K504-1~8] 3.8 Terahertz technologies

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-K504-5] Evaluation of THz-PMT performances for high-resolution carrier density mapping of semiconductor wafers

〇Hinako Yoshinaga¹, Yuma Takida², Kawai Naoya¹, Onoda Hirohisa¹, Minamide Hiroaki², Katsuyama Kota¹, Ohmura Takayuki¹ (1.HPK, 2.Riken)

Keywords:

Terahertz wave,imaging,semiconductor

Previously, we have succeeded in detecting minute changes in the resistivity of silicon wafers by utilizing the nonlinear response characteristics of terahertz-wave photomultiplier tubes (THz-PMTs). In this presentation, we report the results of THz-wave imaging experiments using THz-PMTs toward the applications of a high-resolution carrier density mapping of semiconductor wafers.