Presentation Information
[15a-K504-7]An imaging system using a 300GHz compact terahertz light source and evaluation of silicon wafers
〇Ryoichi Fukasawa1, Norimasa Takahashi1, Eriko Umetsu1, Ikuji Masuda1 (1.Spectra Design Ltd.)
Keywords:
terahertz imaging,evaluation of silicon wafers
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