[15a-P05-1~26] 12.7 Biomedical Engineering and Biochips

[15a-P05-25] Nitrate-Nitrogen Gas Sensing Using Ionic Liquid-Gated Graphene Field-Effect Transistors Coated with Parylene.

〇(M2)Ryo Imaizumi¹, Naoki Shiraishi², Jian Lu³, Mutsumi Kimura¹ (1.Shinshu Univ., 2.NARO, 3.AIST)

Keywords:

ionic liquid gated graphene field-effect transistor,Parylene C

In the ionic liquid gate graphene field-effect transistor (ILGFET), which combines graphene field-effect transistors (GFET) with ionic liquids, it is possible to drive the device at low voltages, and low-concentration gas adsorption on graphene can be tracked with high sensitivity by monitoring changes in the peak voltage value. In addition, Parylene C can be deposited on the surface of a liquid using chemical vapor deposition, and it is expected to have shielding properties. In this study, we report on a sensor in which Parylene C is deposited on an ILGFET.