[15a-P06-1~13] 16 Amorphous and Microcrystalline Materials (Poster)

[15a-P06-9] AR Coating on Micromorph Solar Cells Using SiNx Films Deposited by PECVD

〇Leo Adachi¹, Paula Perez Rodriguez², Govind Padmakumar², Federica Saitta², Arno Smets², Hiroyuki Wada¹ (1.Science Tokyo, 2.TUDelft)

Keywords:

silicon nitride,anti-reflection coating,plasma enhanced chemical vapor deposition

To reduce reflection loss and enhance the conversion efficiency of micromorph solar cells, SiNx thin films were deposited using PECVD. By optimizing deposition conditions, thin films were fabricated to bridge the refractive index gap between the glass substrate and the IOH layer. Based on the refractive indices, optical properties, and durability test results, it was confirmed that the fabricated thin films meet the intended requirements. The findings of this study contribute to the efficiency improvement of micromorph solar cells and provide significant insights into the design of AR coatings for solar cells.