[15p-K206-1~12] Shaping the Future of Green Fabs: Toward Sustainable Manufacturing

1:30 PM - 1:40 PM JST(4:30 AM - 4:40 AM UTC)

[15p-K206-1] Opening Address / Shaping the Future of Green Fab

〇Shin Nakagawa¹ (1.SCREEN)

Keywords:

semiconductor,sustainability,Energy

In this symposium, we will discuss the transition to "Green Fabs" aimed at reducing greenhouse gases and environmental pollutants, and improving energy efficiency. We will introduce cutting-edge technologies such as energy storage technology, the expansion of renewable energy use, PFAS recycling technology, and biomass-derived EUV resists. Additionally, we will cover green policies and growth strategies in Europe and the United States, learning and deepening our understanding of how applied physics can be utilized and successful case studies in achieving sustainable manufacturing processes.