The 72nd JSAP Spring Meeting 2025
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Session Details

Symposium (Oral)Symposium : Shaping the Future of Green Fabs: Toward Sustainable Manufacturing

[15p-K206-1~12]Shaping the Future of Green Fabs: Toward Sustainable Manufacturing

Sat. Mar 15, 2025 1:30 PM - 6:45 PM JST
Sat. Mar 15, 2025 4:30 AM - 9:45 AM UTC
K206 (Lecture Hall Bldg.)
Masashi Aono(Amoeba Energy), Shin Nakagawa(SCREEN)
1:30 PM - 1:40 PM JST(4:30 AM - 4:40 AM UTC)

[15p-K206-1]Opening Address / Shaping the Future of Green Fab

〇Shin Nakagawa1 (1.SCREEN)
Comment()
1:40 PM - 2:20 PM JST(4:40 AM - 5:20 AM UTC)

[15p-K206-2]KIOXIA Group's initiatives for NET-zero GHG emission

〇Jyuri Tanimoto1 (1.KIOXIA Corporation)
Comment()
2:20 PM - 3:00 PM JST(5:20 AM - 6:00 AM UTC)

[15p-K206-3]non-PFAS Biomass EUV resist for Sustainable World

〇Kazuyo Morita1, Yuki Yoshikura1, Harumi Sunaga1 (1.Oji Holdings Corp.)
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3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[15p-K206-4]Reduction of Organic Wastewater using a Membrane Separation Technology

〇Masaya Yamamoto1, Yusuke Ueda1, Shoyo Minami1, Tomohiro Uemura1, Yukifumi Yoshida2, Michinori Iwao2 (1.SCREEN Holdings Co.,Ltd., 2.SCREEN Semiconductor Solutions Co., Ltd.)
Comment()
3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[15p-K206-5]Data-Driven Prediction Model for Si3N4 Wet Etching Using DHF

〇(M1)Koki Shibata1, Takashi Ota2, Koji Ando2, Naoko Misawa1, Chihiro Matsui1, Ken Takeuchi1 (1.Univ. Tokyo, 2.SCREEN SPE)
Comment()
3:30 PM - 4:10 PM JST(6:30 AM - 7:10 AM UTC)

[15p-K206-6]Toward a Circular Society: The Challenge of PFAS Recycling

〇Kohei Kiyohara1, Jun Shibukawa1 (1.SCREEN Semiconductor Solutions)
Comment()
4:25 PM - 5:05 PM JST(7:25 AM - 8:05 AM UTC)

[15p-K206-7]The challenge of introducing energy storage in the manufacturing industry and expanding the use of self-generated renewable energy

〇Toshinori Kokubo1 (1.Musashi Seimitsu Industry Co., Ltd.)
Comment()
5:05 PM - 5:20 PM JST(8:05 AM - 8:20 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15p-K206-8]Case Study on Modeling of Multiple Processes Using Intermediate Variables for Digital Twin Modeling of a Semiconductor Manufacturing

〇Ryosuke Okachi1, Masanori Usui1, Tomohiko Mori1, Junya Muramatsu1, Makoto Kuwahara1, Daigo Kikuta1 (1.TOYOTA CENTRAL R&D LABS., INC.)
Comment()
5:20 PM - 5:35 PM JST(8:20 AM - 8:35 AM UTC)

[15p-K206-9]Development of process flow creation tool

〇Yasunori Hayashi1, Hideki Takahashi1, Masashi Satou1, Toshiyuki Tsuchiya1 (1.Kyoto Uniiv.)
Comment()
5:35 PM - 5:50 PM JST(8:35 AM - 8:50 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardHighlighted Presentation

[15p-K206-10]AI System for Recipe Creation & Verification of Single Wafer Wet Etching in Scarce Data Conditions

〇(M1)Koki Shibata1, Hiroshi Horiguchi2, Chihiro Matsui1, Ken Takeuchi1 (1.Univ. Tokyo, 2.SCREEN SPE)
Comment()
5:50 PM - 6:30 PM JST(8:50 AM - 9:30 AM UTC)

[15p-K206-11]Contradictions and harmonization of Green and Growth policies in EU/US

〇Supika Mashiro1,2,3,4 (1.IRDS FI, 2.SEMI PFAS Initiative, 3.SEMI Japan ICRC, 4.TEL)
Comment()
6:30 PM - 6:45 PM JST(9:30 AM - 9:45 AM UTC)

[15p-K206-12]Shaping the Future of Green Fabs: Toward Sustainable Manufacturing

〇Masashi Aono1 (1.Amoeba Energy)
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