[15p-K210-1~12] 1.6 Ultrasonics

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[15p-K210-5] Analysis of Resonance Properties for A₁ Mode Plate Waves on Thin LiNbO₃ / HR-SiC Plate

〇Noriyuki Watanabe¹, Shoji Kakio¹ (1.Univ. of Yamanashi)

Keywords:

Lithium naobate,Plate waves

In next-generation communication systems such as Beyond-5G/6G, elastic wave devices with high frequencies, wide bandwidths, high Q factors, and high power durability are required as RF filters. In recent years, various plate wave modes in thin-plate structures have been studied, leveraging advancements in bonding and thinning technologies. Among these, the use of high-velocity plate waves has been reported. However, ultra-thin piezoelectric substrates are extremely brittle, making them impractical for manufacturing and durable applications. In this report, building upon previous findings, we investigate the resonant characteristics of high-velocity plate waves in a direct bonding structure of LiNbO₃ (LN) and high-resistance SiC (HR-SiC), aiming to utilize high-velocity elastic waves.