[15p-K210-1~12] 1.6 Ultrasonics

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[15p-K210-6] ScAlN thick film concave lens ultrasonic transducer in the 20-90 MHz

〇ZHANYU LAI^1,2, YOHKOH SHIMANO^1,2, ITSUKI ENDO^1,2, JUNJUN JIA¹, YANAGITANI TAKAHIKO^1,2 (1.Waseda Univ., 2.ZAIKEN)

Keywords:

ScAlN,lens,transducer

Focused ultrasonic transducers (Au/ScAlN/Ti) were fabricated by depositing a thick ScAlN film on a silica glass concave lens using RF magnetron sputtering. The k_t² value of the transducer were estimated to be 24%. For the performance evaluation of the transducer, experiments were conducted with longitudinal waves propagating in water medium to confirm the excitation and reception of longitudinal waves in the bandwidth of 20-90 MHz.