Presentation Information
[15p-K303-3]Atomic layer thickness control of epitaxial Co/Pt(111) superlattice perpendicular magnetic films by sputtering
Jieyuan Song1, Thomas Scheike1, Cong He1, Zhenchao Wen1, Tadakatsu Ohkubo1, Kwangseok Kim2, 〇Hiroaki Sukegawa1, Seiji Mitan1 (1.NIMS, 2.SAIT)
Keywords:
perpendicular magnetization,superlattices
Perpendicular magnetic tunnel junctions (p-MTJs) with strong perpendicular magnetic anisotropy (PMA) play a considerable role as memory cells of magnetoresistive random access memories (MRAMs) due to their scalability (< 10 nm phi). A recent theoretical study predicted that fully fcc(111) oriented MTJs consisting of Co-based PMA alloys, such as CoPt(111), provide a giant tunnel magnetoresistance (TMR) over 2000% with a large bulk PMA energy. Co/Pt(111) superlattices can be a good candidate for (111)-based p-MTJs due to the large PMA energy at a relatively low temperature treatment (~300 °C), especially for an L11 metastable phase. Nevertheless, the sputter growth mechanism of Co/Pt superlattices remains unclear. In this study, we developed atomically controlled epitaxial Co/Pt superlattices down to a monolayer (ML) scale using sputtering to explore future (111)-based p-MTJ applications.
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