[15p-K501-1~12] 22.1 Joint Session M "Phonon Engineering"

1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[15p-K501-2] Controlling thermal conductivity of silicon thin films using femtosecond laser-induced periodic surface structures

〇Byunggi Kim^1,2, Hiroki Hanma¹, Kazuyoshi Fushinobu¹, Masahiro Nomura² (1.Science Tokyo, 2.IIS UTokyo)

Keywords:

LIPSS,Thermal conductivity,femtosecond laser