[15p-K503-1~15] 6.1 Ferroelectric thin films

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[15p-K503-1] Thickness dependence of the coercive field of Pb(Zr, Ti)O₃ applied to FeRAM

〇Takashi Eshita¹, Wengshen Wang, Ko Nakamura¹, Mitsuaki Oikawa¹, Nozomi Sato¹, Yukinobu Hikosaka¹, Junichi Watanabe¹, Hitoshi Saitoh¹, Kouichi Nagai¹ (1.RAMXEED)

Keywords:

FeRAM,Lead zirconate titanate,coercive field

We have decreased the operation voltages of FeRAM from 5 V to 1.8 V by thinning the lead zirconate titanate (PZT) ferroelectric films. Although previous studies have reported that coercive field (Ec) increased with decreasing PZT thickness, we have not observed any decreasing in the Ec. It is considered that our optimization of the PZT-electrode interface, such as reduction of atomic interdiffusion, prevent the increase in the Ec.