[15p-K503-1~15] 6.1 Ferroelectric thin films

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15p-K503-13] Four-layer polarization inverted c-axis parallel ZnO resonator using ion beam assisted sputtering

〇Kohei Ekida^1,2, Yohkoh Shimano^1,2, Takahiko Yanagitani^1,2 (1.Waseda Univ., 2.ZAIKEN)

Keywords:

ZnO,ion beam

c-Axis parallel ZnO thin film excites pure shear ultrasonic waves in the thickness shear mode. By employing a polarization-reversed multilayer structure within the piezoelectric layer, acoustic energy can be effectively trapped. In this study, 4-layer polarization-inverted c-axis-parallel ZnO films were fabricated by ion beam assisted sputtering on SiO2/Ta (3-pair) acoustic Bragg reflectors. Resonance peak was observed around 1.2 GHz with four polarization-inverted layers, confirming higher-order mode driving.