[15p-K507-1~8] 7.2 Applications and technologies of electron beams

1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[15p-K507-1] Dependence of Work Function in Simulation of Coulomb Effect of Spherical Electron Sources

〇Yasunari Sohda¹, Kouki Himeda¹ (1.Univ. of Tsukuba)

Keywords:

electron source,Coulomb effect,simulation

The fundamental characteristics of electron sources used in scanning electron microscopy is represented by the reduced brightness and energy dispersion. In this study, the influence of the Coulomb effect on the electron source characteristics is investigated by simulation for a spherical electron source, which is expected to have high reduced brightness. The dependence on the work function of the electron source was investigated, and it was found that the saturated reduced brightness can be increased by increasing the work function. This is considered to be due to the higher extraction voltage of the electron source.