Presentation Information
[15p-P08-1]Flexibilization of Single-Crystal Silicon Substrates Using MEMS Microfabrication for Flexible Electronics
〇Hidemasa Yamane1, Yoshiharu Yamada1, Yusuke Kondo1, Shuichi Murakami1 (1.ORIST)
Keywords:
Flexible,Silicon,MEMS
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