[16a-K209-1~11] 11.5 Junction and circuit fabrication process, digital applications

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16a-K209-10] Fluorination of native Nb oxide to improve the Q factor of superconducting resonators

〇(M1)Yamato Aoyama¹, Daisuke Ohori¹, Yuichi Fujita², Yoshiro Urade², Kunihiro Inomata², Wataru Mizubayashi², Kazuhiko Endo¹ (1.IFS, Tohoku Univ., 2.AIST)

Keywords:

Niobium,fluorination,dry process