[16a-K305-1~8] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16a-K305-5] Fabrication of Optical Waveguides by Direct Laser Lithography on Sb₂S₃ thin film

〇Mamoru Tanabe¹, Jooyoung Yoo¹, Kotaro Makino², Shogo Hatayama², Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.UTokyo, 2.SFRC, AIST)

Keywords:

Phase change material,Sb2S3,Laser

Phase-change materials have significantly different optical properties, such as refractive index, in the crystalline and amorphous phases. The phase change can be reversibly induced by heating or optical stimulation. Using this, rewritable optical circuits by laser direct lithography have been proposed. We have fabricated and evaluated linear waveguides by laser direct lithography using Sb2S3, which has low toxicity.