[16a-K307-1~10] 9.3 Nanoelectronics

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[16a-K307-7] Study on Non-destructive Characterization of Embedded Nano-structure in Si MOSFET Using Machine Learning

〇Renxiang Lyu¹, Seiya Kasai¹ (1.RCIQE, Hokkaido Univ.)

Keywords:

Machine Learning,Random Nano-structure,Artifact Metrics