Presentation Information
[16a-K401-7]High temperature AlN growth on different misorientation off-angle SiC substrates
〇Yusuke Takayanagi1, Koki Fujii1, Yuto Matsubara1, Yuusuke Takashima1,2, Yoshiki Naoi1,2, Kentaro Nagamatsu1,2 (1.Tokushima Univ., 2.pLED, Tokushima Univ.)
Keywords:
semiconductor,III-V nitrides,MOVPE
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