Presentation Information

[16p-K102-4]Spin-Polarized Scanning Electron Microscope (Spin SEM)

〇Teruo Kohashi1 (1.Hitachi)

Keywords:

magnetic domain,spin polarization,SEM

Spin-polarized scanning electron microscope (spin SEM) is an instrument to observe magnetic domain structures at a ferromagnetic sample surface. It is based on the phenomenon where the spin-polarization of the secondary electrons from a ferromagnetic sample is anti-parallel to the magnetization vector at the originating point of the secondary electrons. This principle has brought us several excellent capabilities. The spatial resolution reaches better than 10 nm, and it can produce magnetic domain images not affected by topography. Moreover, it can analyze not only magnetic domain shapes but also magnetization directions in three dimensions. In this talk, the principle, the structure, and application examples of spin SEM will be introduced with its recent improvements of the equipment.

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