Presentation Information
[16p-K204-4]High-performance Acoustic Wave Devices for Mobile Communication Systems
〇Shoji Kakio1 (1.Univ. Yamanashi)
Keywords:
acoustic wave devices,dissimilar material bonding
In this presentation, I will first outline the operating principle of acoustic wave devices and the characteristics required for mobile communication system applications, then show examples of application of dissimilar material bonding technology to acoustic wave devices and their features. I will also touch upon devices with stacked polarization inversion layers, which have been actively developed recently. Finally, I will introduce the high performance of surface acoustic wave devices developed by the authors using dissimilar material bonded structures between a piezoelectric thin plate and a quartz support substrate.
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