[16p-K209-1~16] 11.4 Analog applications and their related technologies

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[16p-K209-3] Evaluation of SNSPD for 6μm wavelength region

〇Shigehito Miki¹, Satoru Mima¹, Fumihiro China², Masahiro Yabuno¹, Hirotaka Terai¹ (1.NICT, 2.AIST)

Keywords:

SNSPD,photon detector,superconducting detector

We report on the fabrication and performance evaluation of NbTiN-SNSPD devices using a thermally oxidized Si substrate with a film thickness optimized for the 6μm wavelength band.