[16p-K304-1~14] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[16p-K304-2] Optical emission caused by collision of ceramic particles

〇Yasuhito Matsubayashi¹, Tsuyohito Ito², Kentaro Shinoda¹, Kazuo Terashima², Jun Akedo¹ (1.AIST, 2.Univ. Tokyo)

Keywords:

Aerosol deposition,Optical emission

The aerosol deposition (AD) method enables ceramic film formation at room temperature by bombarding a substrate with fine particles accelerated by a gas flow. On the other hand, luminescence phenomena have been reported during AD film formation, and it has been suggested that the luminescence may be caused by fracture emission of fine particles. In this study, we analyzed the film forming environment and the mechanism of the luminescence phenomenon during AD film formation by spectroscopic measurements.