Presentation Information

[16p-K305-2]Low-loss, low-power MOSCAP optical phase shifter using InP membrane waveguide

〇Hiroya Sakumoto1, Tipat Piyapatarakul1, Kasidit Toprasertpong1, Shinichi Takagi1, Mitsuru Takenaka1 (1.The Univ. of Tokyo)

Keywords:

Silicon photonics,III-V semiconductor,Phase shifter

We propose a low-loss, low-power consumption MOS-type optical phase shifter operating on an InP membrane waveguide and demonstrate its operation on a ring resonator. By using a 700 nm thick cladding layer, we suppressed optical loss and utilized the large plasma dispersion effect of InP to obtain a phase shift by accumulating electrons on the surface of the InP membrane waveguide. From the resonance wavelength shift of the ring resonator, we demonstrated low-loss and low-power consumption optical phase shifter operation with a modulation efficiency of 1.9 V·cm, an optical loss of 0.48 dB/π, and a power consumption of less than 1 pW at an applied voltage of 5 V.

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