Presentation Information
[16p-K305-5]Evaluation of Sb2S3 non-volatile optical phase shifter for III-V/Si hybrid waveguide
〇Yosuke Wakita1, Yuto Miyatake1, Shuhei Ohno1, Tomohiro Akazawa1, Kotaro Makino2, Shogo Hatayama2, Stephane Monfray3, Frederic Boeuf3, Kasidit Toprasertpong1, Shinichi Takagi1, Mitsuru Takenaka1 (1.The Univ. of Tokyo, 2.SFRC, AIST, 3.STMicroelectronics)
Keywords:
Silicon Photonics,Phase change material,III-V semiconductor
A ring resonator with the phase-change material antimony sulfide onto a III-V semiconductor thin film was fabricated to correct initial fabrication errors of the ring resonator. It was demonstrated that a non-volatile optical phase shift could be achieved by transitioning antimony sulfide from an amorphous to a crystalline state.
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