[16p-K305-1~16] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-K305-5] Evaluation of Sb₂S₃ non-volatile optical phase shifter for III-V/Si hybrid waveguide

〇Yosuke Wakita¹, Yuto Miyatake¹, Shuhei Ohno¹, Tomohiro Akazawa¹, Kotaro Makino², Shogo Hatayama², Stephane Monfray³, Frederic Boeuf³, Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.The Univ. of Tokyo, 2.SFRC, AIST, 3.STMicroelectronics)

Keywords:

Silicon Photonics,Phase change material,III-V semiconductor

A ring resonator with the phase-change material antimony sulfide onto a III-V semiconductor thin film was fabricated to correct initial fabrication errors of the ring resonator. It was demonstrated that a non-volatile optical phase shift could be achieved by transitioning antimony sulfide from an amorphous to a crystalline state.