[16p-K504-1~15] 6.4 Thin films and New materials

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-K504-7] Correlation of Structure and Inhomogeneity in Low-Refractive-Index Al₂O₃ Optical Films

〇(M2)Tomoaki Suzuki¹, Hiroshi Murotani¹, Takayuki Matsudaira² (1.Tokai Univ., 2.SHINCRON Co.,Ltd.)

Keywords:

optical thin film,aluminum oxide

In this laboratory, we have developed the combination coating method in which the EB deposition and DC pulse sputtering methods are installed in the same vacuum vessel and operated simultaneously. In our previous study, we fabricated low-refractive-index Al₂O₃ optical thin films using this method, but heterogeneity in the refractive index was observed in the thickness direction. In this laboratory, we investigated the relationship between the heterogeneity and the film structure in the low refractive index Al₂O₃ optical thin films.