[16p-K504-1~15] 6.4 Thin films and New materials

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[16p-K504-9] Fundamental investigation of the deposition technology of refractive-index gradient mono-material coatings

〇(M1)Yuhang Yang¹, Naoya Tajima¹, Takayuki Matsudaira², Hiroshi Murotani¹ (1.Grad. Sch. Of Eng., Tokai Univ., 2.Shincron Co., Ltd.)

Keywords:

Optical thim films,Antireflective coating,SiO2

This study aims to establish a technique for layering SiO2 with varying packing densities to produce a mono-material graded-index AR coating utilizing both electron beam (EB) deposition and direct current (DC) pulse sputtering methods within a combination coating equipment.