[16p-K506-1~19] 3.6 Laser processing

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[16p-K506-14] Formation of Striped Periodic Surface Structures using Circularly-Polarized Femtosecond Laser Pulses

〇Shigeki Matsuo¹, Kentaro Fujimoto¹ (1.Shibaura Inst. Tech.)

Keywords:

circularly-polarized light,femtosecond laser,laser-induced surface periodic structures

In the research on laser-induced surface periodic structures, it is generally recognized that a striped periodic structure is formed when linearly-polarized light is used, whereas a periodic structure consisting of dots is formed when circularly-polarized light is used. We discovered a phenomenon in which a striped periodic structure was formed on the surface of silicon substrates by irradiating the sruface with a circularly-polarized femtosecond laser pulse while scanning the laser irradiating spot. The orientation of the stripes was perpendicular to the scanning direction, and the period of the stripes was almost the same as the laser wavelength.