[16p-K506-1~19] 3.6 Laser processing

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)

[16p-K506-17] Fabrication of Si spherical nanoparticles using pulsed laser ablation and inertial impactor.

〇Hikaru Taniguchi¹, Tamao Aoki², Takehito Yoshida³, Ikurou Umezu² (1.Grad. Sch. of Nat, 2.Konan Univ., 3.NIT. Anan college)

Keywords:

Laser abration,Spherical nanoparticles

When performing PLA on a silicon target, spherical particles with a diameter of approximately 100 nm are emitted. When these particles are deposited onto a substrate using a pipe and gas flow, the average particle size is determined by the Stokes number, which depends on the flow velocity and gas pressure. However, at a gas pressure of 2000 Pa, nanoparticles with an average size below 200 nm could not be deposited even when the flow velocity exceeded 39 m/s. In this study, by varying the gas pressure and fluence, we successfully fabricated spherical particles with an average size as small as 50 nm at the same flow velocity.