[16p-K506-1~19] 3.6 Laser processing

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-K506-3] Effect of Pulse Accumulation on the Formation Process of Laser-Induced Periodic Surface Structures

〇Kohei Chigusa¹, Tatsuya Okada¹, Takuro Tomita¹ (1.Tokushima Univ.)

Keywords:

ultrashort pulse laser

In-situ observation of laser-induced surface periodic structures formed by femtosecond laser irradiation was performed using a scanning electron microscope (SEM). 125 pulses were irradiated on Si and SiC substrates, and SEM images of the formed periodic structures were subjected to fast Fourier transform and moment analysis. The results showed that the number of pulses increased in Si and SiC. As a result, the periodic structure on Si substrate increased in proportion to the increase in the number of pulses, while the periodic structure on SiC substrate remained constant regardless of the number of pulses.