Presentation Information
[16p-K507-12]Molecular damage of organic polymers by Ar-GCIB sputtering
〇(M1)Yuri Mizutani1, Makiko Fujii2, Toshio Seki1, Jiro Matsuo1 (1.Kyoto Univ., 2.Yokohama Natl. Univ.)
Keywords:
Secondary Ion Mass Spectrometry,Cluster Ion Beam
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