[16p-K507-1~14] CS.1 Code-sharing Session of 2.3 & 7.4

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)

[16p-K507-13] Dependence of Reactive Gas Supply Method on Cryogenic Etching by GCIB Irradiation

〇(M1)Taichi Ito¹, Seiya Kitanaka¹, Masaya Takeuchi¹, Noriaki Toyoda¹ (1.Univ. of Hyogo)

Keywords:

gas cluster ion beam,cryoetching