[16p-K507-1~14] CS.1 Code-sharing Session of 2.3 & 7.4

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[16p-K507-9] Evaluation of Nitrogen Compositions of Hafnium Nitride Thin Films Using 2.1 MeV Proton Beam for Simultaneous Analysis of Light and Heavy Elements

〇Tomoaki Osumi¹, Yasuhito Gotoh¹ (1.Kyoto Univ.)

Keywords:

hafnium nitride,evaluation of nitrogen compositions,non-Rutherford backscattering analysis

The nitrogen compositions of hafnium nitride (HfN) thin films were evaluated by non-Rutherford backscattering analysis with 2.10 MeV H⁺. The results were compared with those evaluated by 1.63 MeV H⁺. The nitrogen compositions showed good agreements. When other heavy elements are added to HfN, nitrogen and heavy elements can be evaluated simultaneously by PIXE at the same time as n-RBS. Improving the sensitivity of PIXE requires a higher energy of H⁺. It is considered that adopting 2.10 MeV H⁺ as a projectile ion is better when the evaluation of nitrogen composition is carried out simultaneously with the analysis of heavy metal.