[16p-P07-1~8] 15.5 Group IV crystals and alloys

[16p-P07-2] Improvement of the Ge composition in SiGe layers on Si(111) substrate by GeH₄–CVD

〇Yuki Imai¹, Ito Kohei², Katsube Ryoji², Miyamoto Satoru², Suzuki Shota³, Minamiyama Hideaki³, Dhamrin Marwan^3,4, Usami Noritaka^1,2,5 (1.InFuS, Nagoya Univ., 2.Grad. Eng., Nagoya Univ., 3.Toyo Aluminium K.K., 4.Grad. Eng., Osaka Univ., 5.IMaSS Nagoya Univ.)

Keywords:

SiGe,CVD,Solar cell