Presentation Information
[16p-P08-3]Deposition of AlN-ScN-GaN films and their effects on piezoelectric properties
〇Yoichiro Koda1, Daiki Shono1, Yoshihiro Ueoka1, Masami Mesuda1 (1.Tosoh Corp.)
Keywords:
piezoelectric material,piezoelectric property,AlScN
BAW filters are used for transmitting and receiving radio waves in mobile communication devices
such as smartphones, and their performance depends on the characteristics of piezoelectric materials.
However, in order to realize Beyond 5G (6G), which is scheduled to be introduced in the 2030s,
materials which have higher piezoelectric properties must be developed.
In this study, we investigated the deposition conditions of AlN-ScN-GaN films and the effects of
changing the film composition on the piezoelectric properties.
such as smartphones, and their performance depends on the characteristics of piezoelectric materials.
However, in order to realize Beyond 5G (6G), which is scheduled to be introduced in the 2030s,
materials which have higher piezoelectric properties must be developed.
In this study, we investigated the deposition conditions of AlN-ScN-GaN films and the effects of
changing the film composition on the piezoelectric properties.
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