[16p-P09-1~15] 6.2 Carbon-based thin films

[16p-P09-4] Investigation of rotation and vibration temperature of microwave-excited plasmas generated by bubbling feed of organic solvent

〇(B)Kaito Hashiguchi^1,2, Tatsuo Ishijima^1,2, Yusuke Nakano^1,2, Yasunori Tanaka^1,2 (1.Kanazawa Univ., 2.EPEL)

Keywords:

Carbon-based thin film