[16p-P09-1~15] 6.2 Carbon-based thin films

[16p-P09-6] The Effect of Pressure Gradient Sputtering on the Density of DLC Films

Ken Yonezawa^1,3, 〇Yoshihisa Osano^2,3, Tatsuyuki Nakatani³ (1.Kenix Co.,Ltd., 2.Mitsubishi Pencil Co., Ltd., 3.Okayama Univ. of Sci.)

Keywords:

diamond-like carbon film,pressure gradient sputtering

In this study, the pressure gradient sputtering method was employed for the deposition of DLC films, and the effect on film density was evaluated.The results demonstrated that the film density was enhanced, and the findings from Raman spectrum analysis corroborated the improvement in film quality.Moreover, an enhancement in deposition rate was observed.It was ascertained that film characteristics and productivity that surpass those of conventional deposition methods could be attained without the necessity for a specialized power supply. It is anticipated that these findings will contribute to the expansion of the application of DLC films and the realization of an efficient industry and a sustainable society.