[16p-P09-1~15] 6.2 Carbon-based thin films

[16p-P09-7] Spectral Data-Driven Science for DLC Films: Structural Analysis and Density Prediction

〇Yoshihisa Osano^1,2, Tatsuyuki Nakatani¹ (1.Okayama Univ. of Sci., 2.Mitsubishi Pencil Co., Ltd.)

Keywords:

diamond-like carbon film,spectral data-driven science,Raman spectroscopy

In this study, the application of spectral data-driven science to the analysis of the carbon structure of diamond-like carbon (DLC) films and the prediction of their properties was investigated. The relationship between carbon structure and film properties was more effectively elucidated by combining automated five-peak separation analysis of Raman spectra with new visualization methods. Furthermore, the accuracy of film density prediction using partial least squares (PLS) regression was improved by using a variable selection method based on five-peak separation analysis.