[16p-P11-1~13] 6.6 Probe Microscopy

[16p-P11-12] Investigation of Molybdenum Nanospires for Submicron Vertical MEMS Probes

〇(M2C)Ryugo Shimamura¹, Kei Misumi¹, Shun Yasunaga¹, Akio Higo¹, Ryosho Nakane¹, Yoshio Mita¹ (1.UTokyo)

Keywords:

MEMS test probe,nanospire,LSI test

In integrated circuit testing, skating of MEMS probes pose a limit to miniaturization of test pad size. This work proposes "Submicron Vertical MEMS Probes" employing molybdenum nanospires to contact test pads from the test pad's normal through indentation and penetration. Through analysis of indentation traces of nanospires on Au/Cr thin films, a monotonic increase of indentation diameter was observed, suggesting the utility of the nanostructure in probing.