Presentation Information
[16p-P11-6]Atomic-Level Patterning of Si(111) Surface using STM Lithography and its evaluation
〇Kensho Tsukuda1, Onoda Jo2, Hayato Yamashita1, Abe Masayuki1 (1.Osaka Univ., 2.Univ. of Teacher Education Fukuoka)
Keywords:
probe microscope,scanning tunneling microscope,silicon
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